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Tokyo Electron Trias High K CVD


CVD System, 12” <45nm process Vintage 2010
2 Chambers: CVD & ALD Process: NiOx, HfOx

Trias cluster: 2 Loadports
LM: Front end
Main power distribution (MPD) Transfer module, TM

EX reactor, PM2:
Plasma capability: No Includes:
Ozonizer & H20 Box
2 Touch screens ozonizer

High-k CVD reactor PM4:
Thermal based deposition
Transformer box (Hi-K) option elec box:

Manuals & Spareparts included
Machine is in absolute as good as new condition ex R&D facility

PM2: Hafnium Nickel Titaan Vanadium

PM4: Hafnium Nickel Titaan Ruthenium Strontium 


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