Tokyo Electron Trias High K CVD
CVD System, 12” <45nm process
Vintage 2010
2 Chambers: CVD & ALD
Process: NiOx, HfOx
Trias cluster: 2 Loadports
LM: Front end
Main power distribution (MPD)
Transfer module, TM
EX reactor, PM2:
Plasma capability: No
Includes:
Ozonizer & H20 Box
2 Touch screens ozonizer
High-k CVD reactor PM4:
Thermal based deposition
Transformer box (Hi-K) option elec box:
Manuals & Spareparts included
Machine is in absolute as good as new condition ex R&D
facility
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