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TEL Act 12


System TEL ACT 12 Clean Track
Vintage Oct-2011
300mm
The CLEAN TRACK ACT 12 coater/developer t enable stable, high-quality processing and smooth transition from R&D to volume production. The in-line model with exposure tool achieved almost the same footprint and moreover provides higher throughput by high-speed transfer system compared to the previous track series. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. In addition, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. 


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