iGX100N DRY PUMP, 200-230VAC, 50/60Hz, 12A

    15,820.65 15,820.65 15820.65 USD

    € 12,500.00

    Option not available

    This combination does not exist.

    Add to Cart

    Material number : A54611958

    Condition code : USED

    OEM : EDWARDS

    11,500 Hours run time


    S/N: 154005414 - Functional and good as new, has only seen Argon gas on qualification wafers.

    VACUUM PUMP                                               PEAK SPEED 105 M3H-1

    62 CFM

    1750 L MIN-1

    ULTIMATE PRESSURE 5.00E-03 MBAR

    3.75E-03 TORR

    0.50 PA

    POWER AT 700 TORR EXHAUST

    ULTIMATE 1 KW

    AUC (ACTIVE UTILITY CONTROLLER) 0.05 KW

    WATER INLET* 1 SLM

    NITROGEN 4 OR 14 SLM

    FOOTPRINT EXCLUDING EXHAUST 0.20 M2

    WEIGHT 120 KG

    INLET CONNECTION ISO63

    OUTLET CONNECTION NW25

    NOISE AT ULTIMATE < 55 DB(A)