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LAM 490

LAM 490 AutoEtcher

Polysilicon: 490
Wafer size: 6 inch
Upgraded TFT monitors
Incl maintenance console
Conditon: AS IS (No Chiller, No pump but with ENI RF Generator)


Single-wafer processing
Fully automated microprocessor control Cassette-to-cassette wafer processing Vacuum load locked
Programmable, variable electrode spacing Endpoint detection
Configurable for 3-inch to 6-inch wafers Stand-alone or bulk-head mount configuration