LAM 490

LAM 490 AutoEtcher

• Polysilicon: 490
• Wafer size: 6 inch
• Upgraded TFT monitors
• Incl maintenance console
• Conditon: AS IS (No Chiller, No pump but with ENI RF Generator)

Features:

• Single-wafer processing
• Fully automated microprocessor control • Cassette-to-cassette wafer processing • Vacuum load locked
• Programmable, variable electrode spacing • Endpoint detection
• Configurable for 3-inch to 6-inch wafers • Stand-alone or bulk-head mount configuration