Equipment

Semitool (AMAT) Raider ECD 312
SN T239375 300mm

Tokyo Electron Trias High K CVD
SN C13833 300mm

Axcelis Fusion M150PS
150mm

AMAT AKT 1600
PECVD (Gen2) SN6C102

ASMi A400
Poly/Nitr, SN 6155xx

AMAT Oasis clean
Serial nr 414522

Axcelis Fusion ES3 Asher
Serial nr 18E350-06

AMAT Centura High K
Process
chamber

BTU PV 614
Solar Cell Firing Furnace SN ECN-1C

Applied Baccini Soft Line
PV280 semi automatic screen printer SN 9.0084.9650.060

LAM 490
Poly AutoEtch SN 9164

AMAT Centura MXP Chamber

FSI POLARIS 3500
Mini Mobile Track SN 0811-0526-0704 300/200mm

SEMIX TAZMO SOG Track

PolyFlow Triple tower II S-417

KLA Tencor INSPEX EAGLE
Patterned Wafer Laser Inspection SN 0201002-25

LAM 490
Poly AutoEtch (As Is) SN 1821

KLA Tencor INSPEX EAGLE
Patterned Wafer Laser Inspection SN 008009E24

LAM 490
Poly AutoEtch (As Is) SN 1694

KLA TENCOR Surfscan 4500
150mm

SSEC / Veeco ML 3300
200 mm SN M2443

TEL Tactras RLSA Poly Etch Chamber
300 mm SN CVM00025

Centrotherm E2000 320-4
200 mm sn 1_36631.18

Akrion Goldfinger Velocity
Single wafer cleaning system 12" SN931185

TEL Act 12
SN E101491
SN E101491
