SOS-Chem Europe delivers / supports Leading Slurry manufacturers Dongjin and Samsung.
SOS-Chem part of SOS provides the full Slurry program.
Oxide slurry: fumed silica - colloidal
DSO-12: 12% silica solid content, no dilution
DSO-25: 25% silica solid content, compatible to SS-25E
Tungsten (W) slurry.
Fumed => DSW-2500, Dilution type, compatible to SSW-2000
Colloidal => DSW-8000, Low scratch & dishing,
compatible to SSW-***
Test results available including MSDS – CoA
SOS provides you with full supply chain support & process guidance
Evaluation 200mm-300mm CMP polishing tool Tested with Saesol disk / IC2000
Full Slurry product program was added for:
AMAT Mirra-3400 / AP300 - Ebara & Unipla pad
Qualified by Global customers (12-19-50-90-110-130nm)