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Centrotherm E2000 320-4


PECVD
Vintage 2004
Complete system incl all hardware.

Tube 1 &2 silicon nitride (SiN)

Ar
N2
NF3
NH3
SiH4
H2


Tube 3&4 Silicon Oxynitride (SiON)

Ar
N2
N2O
NH3
SiH4
H2 


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