Centrotherm E2000 320-4

PECVD
Vintage 2004
Complete system incl all hardware.

Tube 1 &2 silicon nitride (SiN)

Ar
N2
NF3
NH3
SiH4
H2

Tube 3&4 Silicon Oxynitride (SiON)

Ar
N2
N2O
NH3
SiH4
H2