Axcelis Fusion ES3 Asher

System Axcelis ES3 Asher
Vintage Feb-2001
300mm optional 200mm
Incl chiller, pumps, gasboxes decomissioned in working conditioning, in production till April 2022

System comes incl following spare parts.

Spare chamber module,
All quarts parts used for 1 chamber Main Computer
Microwave 3 pieces Lampcontrollers etc.
Lamps approx. 75 pieces Touchscreen
SMC foreline valve
Throttle valve