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AMAT Oasis clean


Condition “As is” 

Manufacturer:  Applied Materials Type:  300mm Oasis clean
Serial number:  414522
Date of manufacture:  2006 Software revision:  OA_B3.0_38

Configuration:

ChA Axiom (Dry strip)
ChB Tempest (Wet etch, NH4OH, H2O2, HF) ChD Tempest (Wet etch, NH4OH, H2O2, HF)

Modules:

Mainframe
FI (Yaskawa robot)
Bulkfill Chemical cabinet
Rotary vacuum pump (for ChA)
Main AC box
Generator rack
Connection details:  208V 3fase 50/60Hz 240A 


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