AMAT AKT 1600

Condition: un-refurbished  

Tool Model : AMAT 1600 PECVD  

Tool Serial Number : 6C102  

Vintage 2005  

Process: PECVD iN,SiO2, i-a-Si,
SiON and N+ a-Si  

Software Version: AKT7.3  

System Power Rating: 208 VAC 3-
Phase  

Flat panel size: 320 x 352 mm  

(5) Process chambers:   Film Capability SiN,   SiO2,   i-a-Si,   SiON,   N+ a-Si (Remote Plasma Clean)  

Includes:
Chillers

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